Molds for Nanoimprint

About Molds for Nanoimprint

Nanoimprinting is a microfabrication technology that transfers patterns at the tens of nanometer level by pressing a mold, which serves as an original plate. Because of the simplicity of the process, nanoimprinting is expected to be a technology for mass production of microstructures at low cost and with good reproducibility.


Nanoimprinting Methods and Mold Types

Methods of Nanoimprint

Nanoimprint lithography can be roughly classified into two types: “UV method” and “Thermal Method”
■ UV Nanoimprint Method
The UV nanoimprint method replicates patterns by pressing the pattern on the mold against UV-curable resin, which is the hardened by UV Irradiation.
Working at normal temperature is possible, giving this method the unique nature of allowing a high level of precision in the replication of patterns.

■ Thermal Nanoimprint Method
The thermal nanoimprint method replicates patterns by pressing the pattern on the mold strongly against thermoplastic resin, which is then cooled after being heated. Direct processing is possible for a variety of Products if they are made of materials that are softened by heating.

Mold Types

■ Quartz Molds
Quartz molds are mainly used in the UV nanoimprint method. quartz is used as the material for semiconductor photomasks. It is characterized by high rigidity and flatness. The manufacturing process, same as that of semiconductor photomask’s, allows to fabricate fine level patterns that measure a few dozen nanometers. Toppan also develops and manufactures multistage structure molds.

Substrate size : 6025(152×152×6.35mm(t))

■Silicon Molds
Silicon molds are mainly used in the thermal nanoimprint method. Patterns are drawn with an electron beam on a silicon substrate that has been coated with photosensitive resin. Dry etching is then used to make the patterns deeper.
The manufacturing process, same as that of Quartz mold’s, allows to form fine precision patterns. Silicon molds with high aspect ratio patterns are under development.

Pattern Shape Examples

We have already had extensive achievements as Toppan is offering various molds satisfying customers’ needs. We are also focusing on research and development, including the development of three-dimensional structure patterns.
Please feel free to consult us regarding your desired pattern shape, etc.

Click here to inquire about Toppan Photomask.